Surface acoustic wave microsensors using diffused substrates
نویسندگان
چکیده
منابع مشابه
2 Overview of Acoustic-Wave Microsensors
1. Microfabricated, or miniaturized, sensors where acoustic waves, i.e. matter vibrations propagating in elastic media, are involved in the sense that they define the domain of the measurand quantity. Examples of this type of devices are accelerometers, microphones, and acoustic-emission pick-ups. The piezoelectric effect, though often used, is not necessarily required in this class of sensors....
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ژورنال
عنوان ژورنال: IEEE Transactions on Electron Devices
سال: 1988
ISSN: 0018-9383,1557-9646
DOI: 10.1109/16.2526